A Simple Method to Improve Etching Uniformity when Making Phase Type CGHs on a Thick Glass Substrate

نویسندگان

  • Quandou Wang
  • Lei Chen
  • Ulf Griesmann
چکیده

A simple method to optimize the etching uniformity when making a CGH on a thick optical glass substrate is described, which uses a Teflon ring to enclose the substrate during reactive-ion etching (RIE). OCIS codes: (220.4000) Microstructure fabrication; (090.1970) Diffractive optics; (220.1250) Aspherics

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تاریخ انتشار 2010